Boost Productivity for Semiconductor Fabs

The GD-81D can mount two sensors in one unit for dual-gas detection. It is designed to safeguard management resources, such as limited capital investment and space.

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Feature01

Two gas detection in a single unit

Equipped with electrochemical method; ESF sensors x 2, supporting detection of 2 gases. Piping and wiring costs can be reduced by half.

*Examples of gases for ESF sensor

GD-81D_examples of gases

Feature02

Compatible with over 300 existing sensors

More than 300 reliable gas sensors from the previous model GD-70D series can be used directly with the GD-81D series, so there is no need to replace existing sensors just for the GD-81D.

Furthermore, the next generation "F sensor" lineup for the GD-81D enables the installation of two sensors in a single unit.

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Feature03

Quiet operation with minimal vibration

・Reduced Noise

　Revised valve configuration

・Reduced Vibration

　Two diaphragms to cancel vibration

・Reduced Pump-pulsation

　Buffer provided inside chamber

The new Riken RP-80 pump ensures smoother operation and more comfortable working environment.

Feature03

Quiet Operation with Minimal Vibration

・Reduced Noise

　Revised valve configuration

・Reduced Vibration

　Two diaphragms to cancel vibration

・Reduced Pump-pulsation

　Buffer provided inside chamber

The new Riken RP-80 pump ensures smoother operation and more comfortable working environment.

feature03に変更。冗長性はなしで、静音性のみのPRに変更。

音や振動はリスクと捉える。なんのリスクか？オペレーション？職場環境？

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Auto Flow Adjustment

Even when filter clogging or changes in atmospheric conditions cause a drop in flow rate, the GD-81D automatically adjusts the sampling flow to maintain stable gas detection.
This intelligent system ensures uninterrupted and reliable gas monitoring, even under changing conditions — helping protect both personnel and process safety without the need for manual readjustment.

Quick Connection

Quick connection design that allows for quick and secure piping connections without the need for conventional union fittings.
This simple push-in mechanism eliminates complex tightening work, reduces installation time, and minimizes the risk of leakage due to human error, such as under- or over-tightening of the coupling nut.

Remote Monitoring & Control

Operators can check detector status and adjust settings remotely from the upper monitoring system—no need to access the detector body directly.
This capability greatly improves convenience in locations where detectors are installed in hazardous or hard-to-reach areas.

Product Name	GD-81D
Product Image
Product Subtitle	Fixed Gas Detector for Semiconductor
Product Type	Fixed Gas Detector
Industries	Semiconductors
Use Purpose	Safety management
Single/Multi	Single, Multi
Certification
Detectable Gas	Lineup of more than 300 sensors
Detection Range	Depend on Target Gas
Principle of Detection	New Ceramic Catalytic Method, Semi-Conductor Method, Hot Wire Type Semi-Conductor Method, Non-Dispersive Infrared Method, Potentiostatic Electrolysis Method, Membrane Type Galvanic Cell Method, Pyrolysis-Particle Detection Method
Sampling Method	Internal Sample Pump
Ingress Proof Rating	N/A
Dimensions	Approx. 70 (W) x 120 (H) x 145 (D) mm
Weight	Approx. 0.8kg
Remarks	Self-diagnostic Function, Automatic Flow Rate Adjustment
Power Source	24 VDC ±10 %, POE
Continuous Operation
Operating Temperature Range	-10 to 40 ℃ (14 to 104℉)(no sudden changes)
Operating Humidity Range	0 to 95%RH (no condensation)
Applicable Instruments

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Since our beginnings in 1939, Riken Keiki has continued to lead the way in gas detection technology, laying the foundations that support our modern society.

Discover why customers continue to choose Riken Keiki, the global standard in gas detection equipment.