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Gases Used in Semiconductor Production

Worksites for Gas Detectors

Group 1000006397
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Unlike other industrial gases, these gases are associated with the production and technological development of new materials such as semiconductors and optical fibers. As digital technologies have advanced, semiconductor manufacturing has expanded and production volumes have increased. However, the manufacturing process has become more complex, elevating the associated risks.

Why is gas monitoring necessary?

  • Strict control of components and purity levels is required, tailored to specific applications.
  • High flammability can lead to gas explosions. Silane, disilane, and phosphine are prone to spontaneous combustion. Some of the gases can ignite even without air if an ignition source is present, and when they burn, they may undergo a decomposition explosion, releasing significant energy.
  • Corrosion of metals may occur, potentially causing equipment failures or accidents.
  • Some of the gases are toxic to humans. It is necessary to measure gas concentrations to ensure the safety of the working environment.
    • Group 1000005897 (1)
    Quality
    Assurance
    Group 1000005894
    Explosion
    Prevention
    腐食
    Corrosion of
    Metals
    Group 1000005896
    Toxic Gas
    Detection

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    Our new multi-point tape type gas detection system is the ideal safety management solution for semiconductor manufacturing processes. The tape detection method offers two main benefits: it leaves traces when gas is detected and has minimal interference from other gases. Additionally, our products feature easy tape replacement, and all tapes have a storage life of 180 days, making them ideal for on-site operations.

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